OpenAlex is a bibliographic catalogue of scientific papers, authors and institutions accessible in open access mode, named after the Library of Alexandria. It's citation coverage is excellent and I hope you will find utility in this listing of citing articles!
If you click the article title, you'll navigate to the article, as listed in CrossRef. If you click the Open Access links, you'll navigate to the "best Open Access location". Clicking the citation count will open this listing for that article. Lastly at the bottom of the page, you'll find basic pagination options.
Requested Article:
Plasma‐Enhanced Atomic Layer Deposition of Amorphous Tantalum Thin Films for Copper Interconnects Using an Organometallic Precursor
Xu Tian, Yuancan Ding, Gaoda Chai, et al.
Advanced Materials Technologies (2023) Vol. 9, Iss. 4
Closed Access | Times Cited: 1
Xu Tian, Yuancan Ding, Gaoda Chai, et al.
Advanced Materials Technologies (2023) Vol. 9, Iss. 4
Closed Access | Times Cited: 1
Showing 1 citing articles:
Influence of Deposition Temperature on Microstructure and Properties of Tantalum Oxide Sputtered Coatings
Maria P. Nikolova, Iliyan Tzvetkov
Materials (2025) Vol. 18, Iss. 9, pp. 1895-1895
Open Access
Maria P. Nikolova, Iliyan Tzvetkov
Materials (2025) Vol. 18, Iss. 9, pp. 1895-1895
Open Access
