OpenAlex is a bibliographic catalogue of scientific papers, authors and institutions accessible in open access mode, named after the Library of Alexandria. It's citation coverage is excellent and I hope you will find utility in this listing of citing articles!
If you click the article title, you'll navigate to the article, as listed in CrossRef. If you click the Open Access links, you'll navigate to the "best Open Access location". Clicking the citation count will open this listing for that article. Lastly at the bottom of the page, you'll find basic pagination options.
Requested Article:
Science challenges and research opportunities for plasma applications in microelectronics
David B. Graves, Catherine B. Labelle, Mark J. Kushner, et al.
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2024) Vol. 42, Iss. 4
Open Access | Times Cited: 4
David B. Graves, Catherine B. Labelle, Mark J. Kushner, et al.
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2024) Vol. 42, Iss. 4
Open Access | Times Cited: 4
Showing 4 citing articles:
Deep potential molecular dynamics simulations of low-temperature plasma-surface interactions
Andreas Kounis-Melas, Joseph R. Vella, Athanassios Z. Panagiotopoulos, et al.
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2025) Vol. 43, Iss. 1
Closed Access
Andreas Kounis-Melas, Joseph R. Vella, Athanassios Z. Panagiotopoulos, et al.
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2025) Vol. 43, Iss. 1
Closed Access
Nanocalorimetry for plasma metrology relevant to semiconductor fabrication
J. Trey Diulus, Carles Corbella, Feng Yi, et al.
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2025) Vol. 43, Iss. 2
Closed Access
J. Trey Diulus, Carles Corbella, Feng Yi, et al.
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2025) Vol. 43, Iss. 2
Closed Access
Fiber PROES: Phase resolved optical emission spectroscopy via optical fibers for knowledge-based plasma process development and monitoring
Florian Beckfeld, Matthias Janssen, Constantin Neuroth, et al.
Review of Scientific Instruments (2025) Vol. 96, Iss. 3
Closed Access
Florian Beckfeld, Matthias Janssen, Constantin Neuroth, et al.
Review of Scientific Instruments (2025) Vol. 96, Iss. 3
Closed Access
Monte Carlo Modeling and Simulation of Electron Dynamics in Low Temperature Methane Gas
Abdelatif Gadoum, Djilali Benyoucef
Engineering Technology & Applied Science Research (2024) Vol. 14, Iss. 6, pp. 18153-18159
Open Access
Abdelatif Gadoum, Djilali Benyoucef
Engineering Technology & Applied Science Research (2024) Vol. 14, Iss. 6, pp. 18153-18159
Open Access
