
OpenAlex is a bibliographic catalogue of scientific papers, authors and institutions accessible in open access mode, named after the Library of Alexandria. It's citation coverage is excellent and I hope you will find utility in this listing of citing articles!
If you click the article title, you'll navigate to the article, as listed in CrossRef. If you click the Open Access links, you'll navigate to the "best Open Access location". Clicking the citation count will open this listing for that article. Lastly at the bottom of the page, you'll find basic pagination options.
Requested Article:
Resistless EUV lithography: Photon-induced oxide patterning on silicon
Li‐Ting Tseng, Prajith Karadan, Dimitrios Kazazis, et al.
Science Advances (2023) Vol. 9, Iss. 16
Open Access | Times Cited: 8
Li‐Ting Tseng, Prajith Karadan, Dimitrios Kazazis, et al.
Science Advances (2023) Vol. 9, Iss. 16
Open Access | Times Cited: 8
Showing 8 citing articles:
EUV-induced hydrogen desorption as a step towards large-scale silicon quantum device patterning
Procopios Constantinou, Taylor J. Z. Stock, Li‐Ting Tseng, et al.
Nature Communications (2024) Vol. 15, Iss. 1
Open Access | Times Cited: 13
Procopios Constantinou, Taylor J. Z. Stock, Li‐Ting Tseng, et al.
Nature Communications (2024) Vol. 15, Iss. 1
Open Access | Times Cited: 13
Extreme ultraviolet lithography
Dimitrios Kazazis, Jara G. Santaclara, Jan van Schoot, et al.
Nature Reviews Methods Primers (2024) Vol. 4, Iss. 1
Closed Access | Times Cited: 13
Dimitrios Kazazis, Jara G. Santaclara, Jan van Schoot, et al.
Nature Reviews Methods Primers (2024) Vol. 4, Iss. 1
Closed Access | Times Cited: 13
Etchant‐Free Dry‐Developable Extreme Ultraviolet Photoresist Materials Utilizing N‐Heterocyclic Carbene–Metal Complexes
Dowon Kim, Jinhwan Byeon, Joung Real Ahn, et al.
Small (2025)
Closed Access | Times Cited: 1
Dowon Kim, Jinhwan Byeon, Joung Real Ahn, et al.
Small (2025)
Closed Access | Times Cited: 1
Sequentially photocatalytic degradation of mussel-inspired polydopamine: From nanoscale disassembly to effective mineralization
Xinghuan Liu, Danya Li, Mehwish Tabassum, et al.
Journal of Colloid and Interface Science (2024) Vol. 672, pp. 329-337
Closed Access | Times Cited: 4
Xinghuan Liu, Danya Li, Mehwish Tabassum, et al.
Journal of Colloid and Interface Science (2024) Vol. 672, pp. 329-337
Closed Access | Times Cited: 4
Si-Containing Reverse-Gradient Block Copolymer for Inorganic Pattern Amplification in EUV Lithography
Yemin Park, S. Song, Jeehyun Hong, et al.
ACS Macro Letters (2024) Vol. 13, Iss. 8, pp. 943-950
Closed Access | Times Cited: 3
Yemin Park, S. Song, Jeehyun Hong, et al.
ACS Macro Letters (2024) Vol. 13, Iss. 8, pp. 943-950
Closed Access | Times Cited: 3
Recent Advances in Metal-Oxide-Based Photoresists for EUV Lithography
Muhammad Waleed Hasan, Laura Deeb, Sergei Kumaniaev, et al.
Micromachines (2024) Vol. 15, Iss. 9, pp. 1122-1122
Open Access | Times Cited: 3
Muhammad Waleed Hasan, Laura Deeb, Sergei Kumaniaev, et al.
Micromachines (2024) Vol. 15, Iss. 9, pp. 1122-1122
Open Access | Times Cited: 3
Photon Momentum Enabled Light Absorption in Silicon
Sergey S. Kharintsev, Aleksey I. Noskov, Elina I. Battalova, et al.
ACS Nano (2024) Vol. 18, Iss. 39, pp. 26532-26540
Open Access | Times Cited: 1
Sergey S. Kharintsev, Aleksey I. Noskov, Elina I. Battalova, et al.
ACS Nano (2024) Vol. 18, Iss. 39, pp. 26532-26540
Open Access | Times Cited: 1
High-energy tunable ultraviolet pulses generated by optical leaky wave in filamentation
Litong Xu, Tingting Xi
Communications Physics (2024) Vol. 7, Iss. 1
Open Access
Litong Xu, Tingting Xi
Communications Physics (2024) Vol. 7, Iss. 1
Open Access